The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Aug. 30, 2006
Takayuki Yamagishi, Tama, JP;
Tamihiro Kobayashi, Tama, JP;
Akira Watanabe, Tama, JP;
Kunihiro Kaneuchi, Tama, JP;
Takayuki Yamagishi, Tama, JP;
Tamihiro Kobayashi, Tama, JP;
Akira Watanabe, Tama, JP;
Kunihiro Kaneuchi, Tama, JP;
ASM Japan K.K., Tokyo, JP;
Abstract
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector. One of the lower end-effector or the upper end-effector is movably coupled to the arm at a distal end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The fixed end-effector is fixed to the movably coupled end-effector.