Takao Funakubo

Title: The Innovative Contributions of Takao Funakubo

Introduction

Takao Funakubo is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing, holding a total of eight patents. His work has advanced the technology used in various applications, particularly in the semiconductor industry.

Latest Patents

One of his latest patents is a plasma processing method that involves a focus ring disposed on a supporting table to surround the edge of a substrate. This method is performed using a plasma processing apparatus that includes a chamber and a supporting table configured to support the substrate. The process includes forming an organic film on the focus ring to minimize the vertical position difference between the upper surface of the focus ring and a reference position, followed by plasma processing on the substrate. Another notable patent is a method for etching an organic region of a substrate. In this method, an organic film is formed on a surface within the chamber of a plasma processing apparatus. The organic region is then etched by chemical species from plasma in the chamber.

Career Highlights

Throughout his career, Takao Funakubo has worked with notable companies, including Tokyo Electron Limited. His expertise in plasma processing has positioned him as a key figure in the development of innovative technologies in the semiconductor sector.

Collaborations

He has collaborated with esteemed colleagues such as Shinichi Kozuka and Ryuichi Asako, contributing to advancements in their shared field of expertise.

Conclusion

Takao Funakubo's innovative work in plasma processing has led to significant advancements in technology, particularly in the semiconductor industry. His contributions continue to influence the field and inspire future innovations.