The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Jun. 26, 2015
Tokyo Electron Limited, Tokyo, JP;
Takao Funakubo, Miyagi, JP;
Hirofumi Haga, Miyagi, JP;
Shinichi Kozuka, Miyagi, JP;
Wataru Ozawa, Miyagi, JP;
Akihiro Sakamoto, Miyagi, JP;
Naoki Taniguchi, Miyagi, JP;
Hiroshi Tsujimoto, Miyagi, JP;
Kumiko Ono, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.