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For the Inventor, By the Inventor

Miyagi, Japan

Hirofumi Haga

This inventor holds 4 USPTO granted patents. Top assignees: Tokyo Electron Limited, Tokyo Electron Limi Ted. Active years: 2018-2020.

USPTO Granted Patents = 4

% Patents Active = 100.0

Average Co-Inventor Count = 4.8

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:

goldMedal3 out of 10,850 
 
Tokyo Electron Limited
 patents
silverMedal1 out of 103 
 
Tokyo Electron Limi Ted
 patents

Years Active: 2018-2020

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4 patents (USPTO):Explore Patents
1. 10861675 - Plasma processing apparatus and plasma processing method (2020-12-08),
2. 10276405 - Plasma processing apparatus (2019-04-30),
3. 10204763 - Plasma processing apparatus and plasma processing method (2019-02-12),
4. 9984907 - Evacuation method and vacuum processing apparatus (2018-05-29),
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