Location History:
- Nirasaki, JP (2009 - 2016)
- Yamanashi, JP (2013 - 2016)
- Miyagi, JP (2017 - 2023)
Company Filing History:
Years Active: 2009-2025
Title: Innovative Contributions of Hiroshi Tsujimoto
Introduction
Hiroshi Tsujimoto, an esteemed inventor located in Miyagi, Japan, has made significant contributions to the field of plasma processing technology. With an impressive portfolio of 25 patents, Tsujimoto's innovative spirit continues to influence advancements in various applications, particularly in the semiconductor industry.
Latest Patents
Among his latest innovations, Tsujimoto has developed a sophisticated plasma processing apparatus. This apparatus features a chamber, substrate support with a bottom electrode, and a top electrode assembly designed with thermal efficiency in mind. The assembly incorporates a thermally conductive plate and a coolant flow path to regulate the temperature of the top electrode plate effectively. The controller of the system dynamically adjusts the operation of the heating and coolant systems based on real-time temperature readings, showcasing Tsujimoto’s commitment to precision in substrate processing.
Another notable patent is the substrate processing apparatus, which integrates a substrate stage and dual radio-frequency power supplies. By utilizing an impedance converter, the apparatus ensures optimal energy transfer to the substrate, adapting the set impedance according to processing needs. This innovation further demonstrates Tsujimoto's expertise in enhancing the efficiency of semiconductor manufacturing processes.
Career Highlights
Hiroshi Tsujimoto is currently affiliated with Tokyo Electron Limited, a leader in the semiconductor production equipment sector. His consistent contributions have not only advanced the company’s technological capabilities but have also significantly impacted the broader field of materials processing.
Collaborations
Throughout his career, Tsujimoto has had the opportunity to work alongside talented colleagues such as Kumiko Ono and Makoto Kobayashi. These collaborations have fostered a dynamic environment, allowing for the exchange of ideas that drive innovation forward in their field.
Conclusion
Hiroshi Tsujimoto remains a pioneering figure in the realm of plasma processing technology. With a robust body of work that emphasizes precision and efficiency, his inventions continue to shape the future of semiconductor manufacturing. The combination of his innovative patents and collaborative spirit exemplifies the essence of contemporary technological advancement.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.