Takahiro Horiguchi

Title: The Innovative Contributions of Takahiro Horiguchi

Introduction

Takahiro Horiguchi is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 11 patents. His work has advanced the capabilities of plasma processing apparatuses, which are essential in various industrial applications.

Latest Patents

One of Horiguchi's latest patents is a plasma processing apparatus that features a processing chamber made from metal. This apparatus includes a susceptor for mounting substrates, an electromagnetic wave source, and dielectric members that transmit electromagnetic waves into the chamber. Additionally, it incorporates metal electrodes positioned on the bottom surface of each dielectric member, ensuring optimal exposure to the processing environment. Another notable patent involves a plasma processing method that utilizes microwaves propagated through a waveguide to excite gas into plasma for substrate processing. This innovative design enhances the efficiency of plasma generation and processing.

Career Highlights

Throughout his career, Takahiro Horiguchi has worked with esteemed organizations such as Tokyo Electron Limited and Tohoku University. His experience in these institutions has allowed him to refine his expertise in plasma technology and contribute to groundbreaking advancements in the field.

Collaborations

Horiguchi has collaborated with notable colleagues, including Masaki Hirayama and Tadahiro Ohmi. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Takahiro Horiguchi's contributions to plasma processing technology are noteworthy and impactful. His patents and collaborations reflect his dedication to advancing the field, making him a significant figure in the world of innovation.