The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
Jun. 13, 2007
Takahiro Horiguchi, Kanagawa, JP;
Takahiro Horiguchi, Kanagawa, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Microwaves propagated through the waveguide, a plurality of slotsand the dielectric membersin this order are supplied into the processing chamber U where they are used to excite a gas to plasma to be used to process a substrate G. Aluminafills an area inside the waveguidenear an end surface C thereof, and the remaining area inside the waveguide is filled with Teflon. Since the aluminahas a smaller guide wavelength λg compared to the Teflon, the mechanical length measured from the end surface C of the waveguideto the center of the closest slot is reduced compared to the mechanical length of a waveguide filled only with Teflonwhile maintaining the physical characteristic length from the end surface C to the closest slot center at λg/4.