Location History:
- Yamanashi-ken, JP (2002 - 2005)
- Yamanashi, JP (2015)
- Nirasaki, JP (2004 - 2021)
Company Filing History:
Years Active: 2002-2021
Title: The Innovative Contributions of Susumu Arima
Introduction
Susumu Arima, hailing from Nirasaki, Japan, is a noteworthy inventor recognized for his significant contributions in the field of semiconductor technology. With an impressive portfolio of 11 patents, Arima has made strides in developing methods that enhance film formation processes, particularly in tungsten films, which are essential for various electronic applications.
Latest Patents
Among his latest patents, Arima's work on a method for forming a tungsten film with low resistance stands out. This innovative method involves creating a discontinuous film on a substrate, followed by the deposition of a tungsten film using a carefully controlled sequence of gas supplies. The process utilizes a first source gas and a nitriding gas combined with a carrier gas, ensuring an efficient formation of the film. Another significant patent describes a tungsten film forming method that includes the step of initially forming a first tungsten film on a substrate, followed by a second film. The use of specific gas combinations, including diborane and hydrogen, plays a critical role in achieving desired film properties.
Career Highlights
Susumu Arima is employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at this organization has allowed him to explore and refine methods that contribute to advancements in material sciences and engineering technologies. His inventions have implications not only for industry standards but also for innovative future applications in electronics.
Collaborations
In his journey towards innovation, Arima has collaborated with talented colleagues such as Yumiko Kawano and Hideaki Yamasaki. Their teamwork reflects the synergy between experienced professionals in the field, leading to groundbreaking advancements in technology and patent contributions.
Conclusion
Susumu Arima continues to be a pivotal figure in inventing technologies that shape the future of semiconductor manufacturing. His dedication and innovative mindset are evident in his patents, which contribute significantly to advancements in tungsten film applications. As technology evolves, Arima's work is set to influence the future of electronic components and materials.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.