The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Sep. 02, 2008
Yumiko Kawano, Nirasaki, JP;
Susumu Arima, Nirasaki, JP;
Akinobu Kakimoto, Nirasaki, JP;
Toshiyuki Hirota, Tokyo, JP;
Takakazu Kiyomura, Tokyo, JP;
Yumiko Kawano, Nirasaki, JP;
Susumu Arima, Nirasaki, JP;
Akinobu Kakimoto, Nirasaki, JP;
Toshiyuki Hirota, Tokyo, JP;
Takakazu Kiyomura, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A film is formed so that the atomic numbers ratio of Sr to Ti, i.e., Sr/Ti, in the film is not less than 1.2 and not more than 3. The film is then annealed in an atmosphere containing not less than 0.001% and not more than 80% of Oat 500° C. or above. An SrO film forming step or a TiO film forming step are repeated a plurality of times so that a sequence, in which a plurality of SrO film forming steps or/and a plurality of TiO film forming steps are performed continuously, is included. When Sr is oxidized after the adsorption of Sr, Oand HO are used as an oxidizing agent.