Sure Ngo

Title: Innovations by Inventor Sure Ngo in Semiconductor Technology

Introduction

Sure Ngo is a distinguished inventor based in Dublin, California, renowned for his contributions to semiconductor technology. With a remarkable portfolio of eight patents, he has pioneered advancements that significantly impact the field of low dielectric constant (low-k) films, essential for modern electronic devices.

Latest Patents

Among his latest innovations, Sure Ngo has developed methods for single precursor low-k film deposition and ultraviolet curing techniques. One of his notable patents describes a method for forming low-k films characterized by reduced dielectric constants, minimized CHx content, and enhanced hardness. His technique involves utilizing a siloxane precursor, which comprises O—Si—O bonds, to create a siloxane film on a substrate surface, cured with ultraviolet light.

Furthermore, his patent on semiconductor processing outlines systems and methods for generating UV-cured low-k dielectric films. These methods detail the process of introducing deposition precursors into the substrate processing region of a semiconductor chamber, including silicon-and-carbon-containing materials. The resulting films exhibit over 5% hydrocarbon groups before exposure, which are reduced to less than 2% post-ultraviolet treatment.

Career Highlights

Throughout his career, Sure Ngo has established himself as a key player in semiconductor innovation while working with Applied Materials, Inc. His expertise in advanced film deposition processes has positioned him at the forefront of semiconductor technology development. His work is not only significant in terms of its technical achievements but also in its implications for future electronic devices that require high-performance materials.

Collaborations

In his pursuit of innovation, Sure Ngo has collaborated with notable colleagues, including Kang Sub Yim and Bo Xie. These partnerships have enabled a cross-pollination of ideas, enhancing the creative process and leading to the successful development of multiple groundbreaking technologies.

Conclusion

Sure Ngo's contributions to semiconductor technology through his patented innovations reflect the ever-evolving landscape of electronic materials. His dedication to improving low-k film deposition and curing methods underscores the critical role inventors play in advancing technology. Through his work, he continues to shape the future of the semiconductor industry, ensuring that new devices come equipped with the high-quality materials required for optimal performance.