Su-Yu Yeh

Title: Innovations by Su-Yu Yeh in Wafer Processing Technology

Introduction

Su-Yu Yeh, a prominent inventor based in Tainan, Taiwan, has made significant contributions to the field of semiconductor manufacturing. With a remarkable portfolio of 27 patents, he has been at the forefront of developing innovative solutions that enhance wafer processing techniques. His work focuses on advancing the efficiency and effectiveness of semiconductor fabrication processes.

Latest Patents

Among Su-Yu Yeh's latest patents are two notable inventions. The first is a system and method for cleaning a pre-clean process chamber, which involves reducing the chamber's internal pressure and introducing a first gas consisting of oxygen and an inert or noble gas. Plasma is generated within the chamber to facilitate the cleaning process. The internal pressure is then further reduced while continuing to utilize the first gas. Subsequently, a second gas is introduced, allowing for plasma generation using only the second gas. This innovative approach significantly optimizes the cleaning procedure between wafer processing.

The second patent is centered around a wafer treatment system, which comprises a treatment chamber where the wafer is processed. This system includes a gas injection setup designed to deliver a first gas at a specified temperature. A heating enclosure surrounds the gas injector, raising the temperature of the first gas as it enters the treatment area. This method improves the treatment efficiency, making it a valuable advancement in wafer processing technology.

Career Highlights

Su-Yu Yeh has garnered extensive experience throughout his career at Taiwan Semiconductor Manufacturing Company Limited (TSMC). This prestigious company is renowned for its role as a leader in the semiconductor industry. Yeh's innovative contributions have not only advanced the technological capabilities of TSMC but have also pushed the boundaries of what is possible in wafer processing.

Collaborations

Throughout his career, Su-Yu Yeh has collaborated with other talented professionals in the field. Some of his notable coworkers include Keng-Ying Liao and Po-Zen Chen. These partnerships have fostered a creative environment, enabling them to share ideas and drive innovation in semiconductor manufacturing processes.

Conclusion

Su-Yu Yeh's inventions are pivotal in optimizing wafer processing, demonstrating a commitment to innovation in the semiconductor field. His extensive patent portfolio reflects his dedication to improving manufacturing techniques that have a profound impact on the industry. As technology continues to evolve, contributions from inventors like Yeh will remain essential for advancing semiconductor fabrication processes.