logo

For the Inventor, By the Inventor

Tokyo, Japan

Song Yun Kang

This inventor holds 13 USPTO granted patents and 9 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2008-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Song Yun Kang. Retrieved from https://idiyas.com/inventor/song-yun-kang

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 13 

% Patents Active = 53.8

Average Co-Inventor Count = 2.4

ph-index = 1

Forward Citations = 4(Granted Patents)


Location History:

  • Kobe, JP (2010)
  • Nirasaki, JP (2008 - 2014)
  • Tokyo, JP (2017 - 2023)

Company Filing History:

goldMedal13 out of 10,918 
 
Tokyo Electron Limited
 patents

Years Active: 2008-2026

Loading Chart...
13 patents (USPTO):Explore Patents
1. 12707626 - Method for fabricating semiconductor device with oxide semiconductor material (2026-08-11),
2. 11832524 - Method for processing substrate, processing apparatus, and processing system (2023-11-28),
3. 11171286 - Method of processing workpiece (2021-11-09),
4. 11152564 - Substrate manufacturing method and processing system (2021-10-19),
5. 10944051 - Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method (2021-03-09),
6. 10790152 - Method for etching multilayer film (2020-09-29),
7. 10403814 - Method of cleaning and method of plasma processing (2019-09-03),
8. 10181559 - Etching method (2019-01-15),
9. 9947864 - Method for etching object to be processed (2018-04-17),
10. 9611545 - ZnO film production system and production method using ZnO film production system having heating units and control device (2017-04-04),
11. 8753988 - Starting material for use in forming silicon oxide film and method for forming silicon oxide film using same (2014-06-17),
12. 7763551 - RLSA CVD deposition control using halogen gas for hydrogen scavenging (2010-07-27),
13. 7348129 - Electron beam processing method and apparatus (2008-03-25),

Title: Innovations by Song Yun Kang

Introduction

Song Yun Kang is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing, holding a total of 12 patents. His work focuses on advanced methods and systems that enhance the efficiency and effectiveness of manufacturing processes.

Latest Patents

Among his latest patents is a method for processing a substrate, which involves a three-step process. This method includes forming a first film on a second surface of a mask, etching the first surface of an etching layer to create a second film, and finally removing both films by exposing the substrate to plasma of a processing gas. The processing gas used in this method includes oxygen, which plays a crucial role in the overall process. Another notable patent is a method for processing a workpiece aimed at manufacturing a magnetoresistive effect element. This method involves etching multilayer films and heating the workpiece under controlled ambient conditions to optimize the manufacturing process.

Career Highlights

Song Yun Kang is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His innovative approaches and patented methods have contributed to the advancement of technologies in this field.

Collaborations

He has collaborated with notable coworkers, including Takuya Kubo and Keiichi Shimoda, who share a commitment to innovation and excellence in their respective areas of expertise.

Conclusion

Song Yun Kang's contributions to substrate processing and magnetoresistive effect elements highlight his role as a key inventor in the technology sector. His patents reflect a dedication to improving manufacturing processes and advancing the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Loading…