The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Mar. 29, 2004
Kazuyuki Mitsuoka, Nirasaki, JP;
Minoru Honda, Nirasaki, JP;
Song Yun Kang, Nirasaki, JP;
Yusuke Saito, Nirasaki, JP;
Kazuyuki Mitsuoka, Nirasaki, JP;
Minoru Honda, Nirasaki, JP;
Song Yun Kang, Nirasaki, JP;
Yusuke Saito, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An organic material film formed on a surface of an object to be processed is cured by electron beams irradiated thereon through a hydrocarbon radical generating gas. By employing the electron beams and the hydrocarbon radical generating gas, a deterioration of a k value of the organic material film and a reduction of a chemical resistance thereof are suppressed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile