Location History:
- Hachiouji, JP (1989)
- Hachioji, JP (1992 - 1994)
- Hachiohji, JP (1993 - 1995)
- Kodaira, JP (1995 - 2012)
Company Filing History:
11 out of 42,485 
3 out of 2,874 
1 out of 1 Years Active: 1989-2012
Title: Soichi Katagiri: Innovator in Electron Beam Technology
Introduction
Soichi Katagiri is a prominent inventor based in Kodaira, Japan. He has made significant contributions to the field of electron beam technology, holding a total of 14 patents. His work has advanced the capabilities of electron microscopes and charged particle beam apparatuses.
Latest Patents
One of his latest patents is for a small electron gun designed to maintain a high vacuum pressure, which is essential for electron microscopes and electron-beam drawing apparatuses. This innovative electron gun features a nonevaporative getter pump, a heater, a filament, and a mechanism for positioning the electron source. It includes an opening for rough exhausting and an automatically opening/closing valve, along with means for ionizing and decomposing inert gases. Remarkably, this small electron gun can maintain a high vacuum pressure of 10 Torr without the need for an ion pump, all while being compact with a height and width of approximately 15 cm.
Another notable patent is for a charged particle beam apparatus that utilizes an electrostatic lens as the main focusing element. This design aims to achieve a subminiature high-sensitivity high-resolution scanning electron microscope (SEM). The apparatus features a drift tube for the electron beam located within the column between the electron source and the sample, along with a secondary electron detector situated inside the drift tube. This innovation addresses the challenges previously faced in integrating a secondary electron detector, which has been a significant bottleneck in developing subminiature high-resolution SEM columns.
Career Highlights
Soichi Katagiri has worked with notable companies such as Hitachi, Ltd. and Hitachi High-Technologies Corporation. His experience in these organizations has contributed to his expertise in electron beam technology and innovation.
Collaborations
Throughout his career, Katagiri has collaborated with esteemed colleagues, including Shigeo Moriyama and Tsuneo Terasawa. These partnerships have further enriched his work and contributions to the field.
Conclusion
Soichi Katagiri's innovative work in electron beam technology has led to significant advancements in the capabilities of electron microscopes and charged particle beam apparatuses. His contributions continue to influence the field and inspire future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.