Company Filing History:
Years Active: 2006-2009
Title: Innovations by Shwang-Ming Cheng: Advancements in Semiconductor Technology
Introduction
Shwang-Ming Cheng is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents that showcase his innovative work and expertise in this rapidly evolving industry.
Latest Patents
Among his latest patents, two stand out for their groundbreaking applications:
1. **Integration scheme for Cu/low-k interconnects** - This patent introduces a semiconductor structure featuring an opening in a porous dielectric layer. The innovation involves sealing the exposed pores along the sidewalls of the opening using selective or non-selective deposition methods. This results in a damascene interconnect structure enhanced by the incorporation of a pore sealing layer.
2. **Glue layer for adhesion improvement between conductive line and etch stop layer in an integrated circuit chip** - In this invention, a conductive line is designed within a first intermetal dielectric (IMD) layer, with a glue layer placed to improve adhesion. This layer consists of a non-oxygen-containing material that acts as an oxygen barrier, thus preventing oxidation of the conductive line. The innovative design features a hardness greater than that of the conductive line, further enhancing the structure's durability.
Career Highlights
Shwang-Ming Cheng is currently employed at Taiwan Semiconductor Manufacturing Company Limited (TSMC), a leader in the semiconductor manufacturing industry. His work at TSMC has been pivotal in advancing semiconductor technology, especially in improving interconnects and overall chip performance.
Collaborations
Throughout his career, Cheng has collaborated with notable colleagues such as Keng-Chu Lin and Tien-I Bao. These partnerships have fostered an environment of innovation and creativity, enabling the development of cutting-edge technologies that push the boundaries of semiconductor design and manufacturing.
Conclusion
Shwang-Ming Cheng is a distinguished inventor whose contributions to semiconductor technology are evidenced by his six patents. His work not only enhances the performance of integrated circuits but also sets new standards in the industry. As he continues to innovate at Taiwan Semiconductor Manufacturing Company Limited, the impact of his advancements will likely be felt for years to come.