Location History:
- Tucson, AZ (US) (1995 - 2011)
- Santa Clara, CA (US) (2013 - 2019)
Company Filing History:
18 out of 1,787 
4 out of 7 
2 out of 641 
Years Active: 1995-2019
Title: Shouhong Tang: Innovator in Wafer Measurement Technologies
Introduction
Shouhong Tang is a prominent inventor based in Santa Clara, CA, known for his significant contributions to the field of semiconductor measurement technologies. With a remarkable portfolio of 24 patents, he has been instrumental in advancing the techniques used to monitor and process wafer structures.
Latest Patents
One of Shouhong Tang's latest patents is focused on systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tools. This innovative approach eliminates the need for traditional phase unwrapping by operating directly in a curvature domain, streamlining the analysis of the height domain.
Additionally, he has developed a method and apparatus to fold optics in tools designed for measuring the shape and thickness of large, thin substrates. His design incorporates a folding mirror configuration, allowing light beams to traverse the same space multiple times, considerably reducing the tool’s size and footprint. This strategy not only enhances performance but also permits the use of smaller folding mirrors compared to previous designs.
Career Highlights
Shouhong Tang has worked with renowned companies such as Kla-Tencor Corporation and Phase Shift Technology, Inc., where he has been pivotal in driving technological advancements. His vast experience in the semiconductor industry has enabled him to make significant impacts through his inventions.
Collaborations
Throughout his career, Tang has collaborated with skilled professionals, including Klaus Reinhard Freischlad and Andrew An Zeng. Their combined expertise has contributed to the successful development and implementation of cutting-edge measurement technologies in the semiconductor sector.
Conclusion
Shouhong Tang's innovative approaches to wafer measurement and processing technology demonstrate his commitment to enhancing the semiconductor industry. His patents reflect not only his technical prowess but also his ability to collaborate effectively with fellow experts. As the industry continues to evolve, Tang's contributions remain vital to advancing semiconductor measurement solutions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.