The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Apr. 04, 2011
Applicants:
An Andrew Zeng, Fremont, CA (US);
Shouhong Tang, Santa Clara, CA (US);
Steve Cui, Fremont, CA (US);
Inventors:
Assignee:
KLA Tencor, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 11/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is a method and system for providing environmental control for a vibration sensitive system such as an interferometric measurement system, while minimizing acoustic noise during data acquisition.