The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Mar. 07, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Chunhai Wang, Pleasanton, CA (US);
Chunsheng Huang, San Jose, CA (US);
Andrew An Zeng, Fremont, CA (US);
Frederick Arnold Goodman, Oakland, CA (US);
Shouhong Tang, Santa Clara, CA (US);
Yi Zhang, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/06 (2006.01); G01B 11/24 (2006.01); G02B 17/00 (2006.01); G02B 27/28 (2006.01); H04N 5/225 (2006.01);
U.S. Cl.
CPC ...
G01B 11/06 (2013.01); G01B 9/0203 (2013.01); G01B 9/02021 (2013.01); G01B 11/24 (2013.01); G01B 11/2441 (2013.01); G02B 17/008 (2013.01); G02B 27/283 (2013.01); H04N 5/225 (2013.01); G01B 2290/70 (2013.01);
Abstract
A semiconductor measuring tool has a folding mirror configuration that directs a light beam to pass the same space multiple times to reduce the size and footprint. Furthermore, the folding mirrors may reflect the light beam at less than forty-five degrees; thereby allowing for smaller folding mirrors as compared to the prior art.