Location History:
- Milpitas, CA (US) (2015)
- Fremont, CA (US) (2015 - 2018)
Company Filing History:
Years Active: 2015-2018
Title: The Innovative Contributions of Andrew An Zeng
Introduction
Andrew An Zeng is a notable inventor based in Fremont, CA. He has made significant contributions to the field of semiconductor measurement technology. With a total of 3 patents to his name, Zeng's work focuses on improving the accuracy and efficiency of measurement tools used in the semiconductor industry.
Latest Patents
Zeng's latest patents include a method and apparatus to fold optics in tools for measuring the shape and/or thickness of a large and thin substrate. This innovative semiconductor measuring tool features a folding mirror configuration that directs a light beam to pass through the same space multiple times, effectively reducing the size and footprint of the tool. Additionally, the folding mirrors can reflect the light beam at angles of less than forty-five degrees, allowing for smaller folding mirrors compared to previous designs.
Another significant patent by Zeng addresses the reduction of registration error of front and back wafer surfaces utilizing a see-through calibration wafer. This patent outlines a calibration wafer and a method for calibrating an interferometer system. The calibration method involves determining the locations of holes defined in the calibration wafer based on two opposite intensity frames. It also includes comparing these locations against measurements from an external device and adjusting optical magnifications based on the comparison results. This process ultimately helps in generating distortion maps to reduce registration errors or optical distortions in subsequent measurements.
Career Highlights
Andrew An Zeng is currently employed at KLA Tencor Corporation, a leading company in the semiconductor industry. His work at KLA Tencor has allowed him to apply his innovative ideas and contribute to advancements in measurement technology.
Collaborations
Zeng collaborates with talented coworkers such as Shouhong Tang and Yi Zhang. Their combined expertise fosters an environment of innovation and creativity, leading to the development of cutting-edge technologies in the field.
Conclusion
Andrew An Zeng's contributions to semiconductor measurement technology through his patents and work at KLA Tencor Corporation highlight his role as an influential inventor. His innovative approaches continue to shape the industry and improve measurement accuracy.