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For the Inventor, By the Inventor

Utsunomiya, Japan

Shinji Wakui

This inventor holds 21 USPTO granted patents, primarily in Exposure Apparatus. Top assignee: Canon Kabushiki Kaisha. Active years: 1995-2006.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shinji Wakui. Retrieved from https://idiyas.com/inventor/shinji-wakui

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 21

% Patents Active = 100.0

Average Co-Inventor Count = 1.5

ph-index = 13

Forward Citations = 378(Granted Patents)


Location History:

  • Kawasaki, JP (1995 - 1996)
  • Komae, JP (2004)
  • Tochigi, JP (2004)
  • Utsunomiya, JP (1996 - 2006)

Company Filing History:

goldMedal21 out of 93,085 
 
Canon Kabushiki Kaisha
 patents

Years Active: 1995-2006

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Areas of Expertise:
Exposure Apparatus
Anti-Vibration System
Precision Positioning
Vibration Isolation
Temperature Adjusting
Stage System
Projection Control
Position Control
Active Vibration Isolator
Device Manufacturing
Vibration Removal
Stage-Drive Control
21 patents (USPTO):Explore Patents
1. 7072777 - Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method (2006-07-04),
2. 6809300 - Temperature adjusting system in exposure apparatus (2004-10-26),
3. 6684132 - Active anti-vibration apparatus and exposure apparatus (2004-01-27),
4. 6477908 - Pedestal with vibration sensor, and exposure apparatus having the same (2002-11-12),
5. 6473159 - Anti-vibration system in exposure apparatus (2002-10-29),
6. 6448723 - Stage system and exposure apparatus (2002-09-10),
7. 6378672 - Active vibration isolation device and its control method (2002-04-30),
8. 6359688 - Projection exposure apparatus and method of controlling same (2002-03-19),
9. 6327026 - Exposure apparatus and positioning apparatus (2001-12-04),
10. 6322060 - Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method (2001-11-27),
11. 6286644 - Active vibration isolator, exposure apparatus, exposure method and device manufacturing method (2001-09-11),
12. 6213443 - Anti-vibration apparatus and exposure apparatus using the same (2001-04-10),
13. 6170622 - Anti-vibration apparatus and anti-vibration method thereof (2001-01-09),
14. 6128552 - Anti-vibration apparatus and method (2000-10-03),
15. 5900707 - Stage-drive control apparatus and method, and scan-projection type (1999-05-04),

Title: **Shinji Wakui: A Pioneer in Exposure Apparatus Innovations**

Introduction

Shinji Wakui, a distinguished inventor based in Utsunomiya, Japan, has made significant contributions to the field of exposure apparatus technology. With an impressive portfolio of 21 patents, he has played a crucial role in advancing innovations that enhance the functionality and efficiency of exposure systems.

Latest Patents

Among his latest innovations are two notable patents: the Exposure Apparatus Anti-Vibration Apparatus and a Temperature Adjusting System in Exposure Apparatus. The anti-vibration apparatus features a motion control system with a structure, multiple actuators, and sensors that monitor the motion states. This system utilizes a pseudo-random signal generator to ensure smooth operation by applying calculated forces to the structure.

The temperature adjusting system boasts a dual temperature measuring unit that accurately maintains the desired temperature within the exposure apparatus. It consists of controllers that respond to measurements from blowing outlet ports, ensuring optimum performance and precision during the exposure process.

Career Highlights

Shinji Wakui is currently affiliated with Canon Kabushiki Kaisha, where he actively contributes to the development of cutting-edge exposure technologies. His work has been instrumental in refining processes that are essential for the manufacturing of high-precision optical components.

Collaborations

Throughout his career, Wakui has collaborated with esteemed colleagues, including Takehiko Mayama and Mikio Sato. These partnerships have fostered an environment of innovation, allowing for the exchange of ideas and expertise that propel their projects forward.

Conclusion

Shinji Wakui’s innovative contributions to exposure apparatus technology underscore his role as a leading inventor in this specialized field. His plethora of patents not only reflects his dedication and skill but also enhances the operational capabilities of various exposure systems within the industry, solidifying Canon's commitment to technological advancement.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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