The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Jul. 07, 2000
Applicant:
Inventor:
Shinji Wakui, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 2/100 ;
U.S. Cl.
CPC ...
G01D 2/100 ;
Abstract
An exposure apparatus includes a major structure, an active anti-vibration system for supporting the major structure, a pedestal on which the major structure is mounted through the active anti-vibration system, and a vibration sensor embedded in or incorporated in the pedestal. This arrangement accomplishes detection of a signal related to ground vibration without being influenced by any local vibration.
Wakui, Shinji. (2002). Pedestal with vibration sensor, and exposure apparatus having the same (U.S. Patent No. 6477908). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6477908
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile