The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Mar. 06, 1998
Applicant:
Inventors:
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16F 1/5023 ; F16F 1/5027 ; F16F 1/503 ; G05D 1/902 ;
U.S. Cl.
CPC ...
F16F 1/5023 ; F16F 1/5027 ; F16F 1/503 ; G05D 1/902 ;
Abstract
An anti-vibration apparatus is equipped with a plurality of active support legs which support an anti-vibration table and which are able to actively operate to control the motion of the anti-vibration table in a horizontal plane. The apparatus is further equipped with a pressure feedback loop for detecting the internal pressure of an air spring provided in each of the plurality of active support legs and for feeding a signal, which is based on the detected internal pressure of the air spring, back to the control system of the anti-vibration apparatus.