Shih-Tzung Chang

Title: Innovations of Shih-Tzung Chang

Introduction

Shih-Tzung Chang is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on enhancing the performance and efficiency of integrated circuits and laser calibration methods.

Latest Patents

One of his latest patents is titled "Semiconductor devices having post passivation interconnections and a buffer layer." This invention discloses an integrated circuit that features post passivation interconnections with a second connection pattern. A passivation layer, preferably made of a non-oxide material, is formed over the integrated circuit, which already has a first plurality of contact pads in a first connection pattern. A buffer layer, ideally a silicon oxide layer, is then formed over the passivation layer, with a thickness substantially smaller than that of the passivation layer. A post passivation metal layer is deposited over the buffer layer, and a second plurality of contact pads, as part of the second connection pattern, is formed in the post passivation metal layer.

Another notable patent is the "Test device and method for laser alignment calibration." This invention presents a novel test device and method for calibrating the alignment of a laser beam emitted from a laser metrology tool with respect to a target area on a substrate. The test device includes a laser-sensitive material that has a calibration pattern featuring a target point. When the tool is properly adjusted, the laser beam strikes the target point and is released to production. If the laser beam misses the target point, the tool is re-adjusted and re-tested until the laser beam successfully strikes the target point.

Career Highlights

Shih-Tzung Chang has worked with Taiwan Semiconductor Manufacturing Company Limited, where he has contributed to various innovative projects. His expertise in semiconductor technology has made him a valuable asset in the industry.

Collaborations

Throughout his career, Shih-Tzung has collaborated with notable professionals, including Ying-Lang Wang and Kei-Wei Chen, who have contributed to his research and development efforts.

Conclusion

Shih-Tzung Chang's innovative work in semiconductor technology and laser calibration has significantly impacted the field. His numerous patents reflect his dedication to advancing technology and improving efficiency in electronic devices.