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Taichung, Taiwan

Shih-Tzung Chang

USPTO Granted Patents = 10

Average Co-Inventor Count = 6.7

ph-index = 5

Forward Citations = 53(Granted Patents)

Location History:

Feng-Yuan, TW (2001 - 2003)
Feugyuan, TW (2004)
Fengyuan Taichung, TW (2004)
Hsin-Chu, TW (2006)
Vancouver, WA (US) (2007)
Taichung, TW (2006 - 2009)

Company Filing History:

8 out of 40,850

Taiwan Semiconductor Manufacturing Comp. Ltd.

National Science Council

1 out of 832,880

Other

patents

Years Active: 2001-2009

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7528478 - Semiconductor devices having post passivation interconnections and a buffer layer (2009-05-05),

2. 7304728 - Test device and method for laser alignment calibration (2007-12-04),

3. 7128821 - Electropolishing method for removing particles from wafer surface (2006-10-31),

4. 7071100 - Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process (2006-07-04),

5. 7026233 - Method for reducing defects in post passivation interconnect process (2006-04-11),

6. 6828226 - Removal of SiON residue after CMP (2004-12-07),

7. 6769959 - Method and system for slurry usage reduction in chemical mechanical polishing (2004-08-03),

8. 6626741 - Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing (2003-09-30),

9. 6531382 - Use of a capping layer to reduce particle evolution during sputter pre-clean procedures (2003-03-11),

10. 6174454 - Slurry formulation for selective CMP of organic spin-on-glass insulating layer with low dielectric constant (2001-01-16),

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