The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Sep. 15, 2004
Shih-tzung Chang, Vancouver, WA (US);
Yu-ku Lin, Hsin-Chu, TW;
Shih-ho Lin, Hsin-Chu, TW;
Kei-wei Chen, Taipei, TW;
Ting-chun Wang, Taoyuan, TW;
Ching-hwan Su, Hsin-Chu, TW;
Ying-lang Wang, Taichung County, TW;
Shih-Tzung Chang, Vancouver, WA (US);
Yu-Ku Lin, Hsin-Chu, TW;
Shih-Ho Lin, Hsin-Chu, TW;
Kei-Wei Chen, Taipei, TW;
Ting-Chun Wang, Taoyuan, TW;
Ching-Hwan Su, Hsin-Chu, TW;
Ying-Lang Wang, Taichung County, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A novel test device and method for calibrating the alignment of a laser beam emitted from a laser metrology tool with respect to a target area on a substrate. The test device includes a laser-sensitive material having a calibration pattern that includes a target point. When the tool is properly adjusted, the laser beam strikes the target point and is released to production. If the laser beam misses the target point, the tool is re-adjusted and re-tested until the laser beam strikes the target point.