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Shih-Chi Wang

USPTO Granted Patents = 9

Average Co-Inventor Count = 4.5

ph-index = 6

Forward Citations = 148(Granted Patents)

Location History:

Taipei, TW (2013 - 2015)
Hsinchu County, TW (2016)
Zhubei, TW (2018)

Company Filing History:

9 out of 40,780

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2013-2018

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9 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9911575 - Apparatus for charged particle lithography system (2018-03-06),

2. 9390891 - Apparatus for charged particle lithography system (2016-07-12),

3. 8987689 - Efficient scan for E-beam lithography (2015-03-24),

4. 8945803 - Smart subfield method for E-beam lithography (2015-02-03),

5. 8877410 - Data process for E-beam lithography (2014-11-04),

6. 8677511 - Apparatus for charged particle lithography system (2014-03-18),

7. 8609308 - Smart subfield method for E-beam lithography (2013-12-17),

8. 8601407 - Geometric pattern data quality verification for maskless lithography (2013-12-03),

9. 8563224 - Data process for E-beam lithography (2013-10-22),

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