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For the Inventor, By the Inventor

Hsinchu, Taiwan

Sheng-Kang Yu

This inventor holds 57 USPTO granted patents and 27 published patent applications, primarily in EUV Lithography. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2018-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Sheng-Kang Yu. Retrieved from https://idiyas.com/inventor/sheng-kang-yu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 57 

% Patents Active = 100.0

Average Co-Inventor Count = 5.6

ph-index = 3

Forward Citations = 44(Granted Patents)

Forward Citations (Not Self Cited) = 22(Dec 10, 2025)


Company Filing History:

goldMedal56 out of 42,872 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents
silverMedal1 out of 481 
 
Taiwan Semiconductor Manufacturing Co., Ltd.
 patents

Years Active: 2018-2026

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Areas of Expertise:
EUV Lithography
Semiconductor Processing
Photolithography
3D Sensing
Thermal Control
Debris Removal
Radiation Source
Inspection Systems
Temperature Control
Contamination Monitoring
Reticle Cleaning
Acoustic Particle Deflection
57 patents (USPTO):Explore Patents
1. 12717238 - Method and apparatus for mitigating tin debris (2026-08-25),
2. 12693603 - Inspection tool for an extreme ultraviolet radiation source to observe tin residual (2026-07-28),
3. 12684679 - Semiconductor system inspection tool and methods of operation (2026-07-14),
4. 12560868 - System and method for omnidirectional real time detection of photolithography characteristics (2026-02-24),
5. 12541152 - EUV lithography system with 3D sensing and tunning modules (2026-02-03),
6. 12520385 - Semiconductor processing tool and methods of operation (2026-01-06),
7. 12510827 - EUV radiation source apparatus for lithography (2025-12-30),
8. 12487534 - Semiconductor processing tool and methods of operation (2025-12-02),
9. 12461454 - Semiconductor processing tool and method of using the same (2025-11-04),
10. 12449734 - Lithography apparatus and method (2025-10-21),
11. 12422755 - Semiconductor processing tool and methods of operation (2025-09-23),
12. 12405529 - Lithography system and methods (2025-09-02),
13. 12372887 - Methods of cleaning a lithography system (2025-07-29),
14. 12372886 - Acoustic particle deflection in lithography tool (2025-07-29),
15. 12372878 - Inspection system for extreme ultraviolet (EUV) light source (2025-07-29),

Title: The Innovative Journey of Inventor Sheng-Kang Yu

Introduction: Sheng-Kang Yu is a renowned inventor hailing from Hsinchu, Taiwan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Sheng-Kang Yu holds several patents in the areas of semiconductor technology, renewable energy, and artificial intelligence, showcasing his diverse range of expertise and innovative spirit.

Career Highlights: With a career spanning over two decades, Sheng-Kang Yu has worked with leading tech companies and research institutions, spearheading projects that have revolutionized the industry.

Collaborations: Throughout his career, Sheng-Kang Yu has collaborated with top engineers, scientists, and researchers from around the world, fostering a culture of innovation and knowledge exchange.

Conclusion: Sheng-Kang Yu's relentless pursuit of innovation and his passion for pushing the boundaries of technology make him a true pioneer in the world of inventions.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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