The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 11, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Jou-Hsuan Lu, New Taipei City, TW;
Chiao-Hua Cheng, Tainan City, TW;
Cheng-Hsuan Wu, New Taipei City, TW;
Ko-Ching Hou, Taipei City, TW;
Jyun-Yan Chuang, Hsinchu City, TW;
Cheng-Hao Lai, Taichung City, TW;
Yu-Kuang Sun, Hsinchu City, TW;
Sheng-Kang Yu, Hsinchu City, TW;
Shang-Chieh Chien, New Taipei City, TW;
Li-Jui Chen, Hsinchu City, TW;
Heng-Hsin Liu, New Taipei City, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
Some implementations described herein provide techniques and apparatuses for inspecting interior surfaces of a vessel of a radiation source for an accumulation of a target material. An inspection tool, including a laser-scanning system and a motor system supported by an elongated supported member, may be inserted into the vessel to generate an accurate three-dimensional profile of the interior surfaces. Use of the inspection tool is efficient, with short setup and scan times that substantially reduce a duration associated with evaluating the interior surfaces of the vessel for the accumulation.