Taipei, Taiwan

Shang-Chieh Chien

This inventor holds 172 USPTO granted patents and 38 published patent applications, primarily in EUV Lithography (CPC class G03F7-70033). Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shang-Chieh Chien. Retrieved from https://idiyas.com/inventor/shang-chieh-chien

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 172 

% Patents Active = 96.5

Average Co-Inventor Count = 5.9

ph-index = 5

Forward Citations = 516(Granted Patents)

Forward Citations (Not Self Cited) = 348(Dec 10, 2025)


Inventors with similar research interests:

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Location History:

  • Taipei, TW (2019 - 2022)
  • New Taipei, TW (2015 - 2024)
  • Hsinchu, TW (2022 - 2024)

Company Filing History:


Years Active: 2015-2026

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Areas of Expertise:
EUV Lithography
Radiation Source
Particle Removal
Thermal Control
Photolithography
Inspection System
Debris Detection
3D Sensing
Semiconductor Processing
Lithography Apparatus
Contamination Monitoring
Mask Inspection
172 patents (USPTO):Explore Patents

Certainly! Here is the article about inventor Shang-Chieh Chien:

Title: Shang-Chieh Chien: Pioneering Innovations in Lithography and Mask Cleaning

Introduction:

Shang-Chieh Chien, a renowned inventor based in New Taipei, Taiwan, has made significant contributions to the field of lithography and mask cleaning. With an impressive portfolio of 116 patents, Chien's work has revolutionized the semiconductor industry.

Latest Patents:

Among his latest patents is the development of a cutting-edge lithography apparatus and method. This innovation involves a novel technique of heating and cooling components of extreme ultraviolet sources to enhance efficiency and performance. Additionally, Chien's invention of a mask cleaning apparatus utilizing mitigation and hydrogen-containing gases showcases his commitment to advancing technology in semiconductor manufacturing.

Career Highlights:

Chien is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited, a leading semiconductor manufacturer in Taiwan. His expertise in lithography and semiconductor processes has been pivotal in the company's success and technological advancements.

Collaborations:

Throughout his career, Chien has collaborated with esteemed colleagues such as Li-Jui Chen and Po-Chung Cheng. Together, they have synergized their skills and knowledge to push the boundaries of innovation in the semiconductor industry.

Conclusion:

In conclusion, Shang-Chieh Chien stands as a remarkable figure in the world of semiconductor technology, with a diverse portfolio of patents that reflect his ingenuity and dedication to advancing the field. His pioneering work in lithography and mask cleaning continues to shape the future of semiconductor manufacturing, making him a key player in driving technological progress forward.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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