Satish Sundar

Title: Innovations by Satish Sundar in Wafer Processing and Robot Calibration

Introduction

Satish Sundar, an accomplished inventor based in Milpitas, California, holds an impressive portfolio of 27 patents. His work primarily focuses on advancements in wafer processing systems and robotic calibration techniques, contributing significantly to the semiconductor industry.

Latest Patents

Among his latest innovations is a patented **Wafer Processing System with Chuck Assembly Maintenance Module**. This invention integrates a ring maintenance module designed to load wafers into a chuck assembly while enabling cleaning and inspection of the chuck assembly utilized in electroplating processors. The system features a shaft connected to a rotor plate, with a rotation motor that facilitates movement. Additionally, a chuck clamp secures the assembly, while a lift motor allows for the raising and lowering of the rotor plate for efficient wafer loading and unloading. The assembly can also be positioned for various processing stages, supported by a swing arm equipped with spray nozzles for cleaning.

Another significant patent is the **Method and Apparatus for Robot Calibrations with a Calibrating Device**. This invention outlines a method that includes moving the calibrating device over a target to measure distances between light spots produced by sensors and the target’s perimeter. It further enables the determination of the calibrating device's displacement and rotation angle relative to the target, ultimately allowing the calibration of a robot's position based on these measurements.

Career Highlights

Satish Sundar has made his mark in the technology sector by working with prestigious companies, including Applied Materials, Inc. His extensive experience contributes to his innovative capabilities and understanding of complex systems.

Collaborations

Throughout his career, Satish has collaborated with notable professionals, including Swaminathan Balakrishnan and Mario David Silvetti. These partnerships have likely enriched the innovation process, combining diverse expertise to achieve groundbreaking results.

Conclusion

With a robust portfolio of patents and a career characterized by significant contributions to wafer processing and robotics, Satish Sundar stands out as a key figure in his field. His innovations are likely to inspire future developments in technology, showcasing the power of inventive thinking in addressing industry challenges.