The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Oct. 23, 2008
Robert B. Moore, Lewistown, MT (US);
Eric Ruhland, Pleasanton, CA (US);
Satish Sundar, Milpitas, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Robert B. Moore, Lewistown, MT (US);
Eric Ruhland, Pleasanton, CA (US);
Satish Sundar, Milpitas, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.