The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Oct. 29, 2003
Pyongwon Yim, Sunnyvale, CA (US);
Satish Sundar, Milpitas, CA (US);
Vinay Shah, San Francisco, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Douglas Kitajima, San Jose, CA (US);
Venkatesh Babu, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Indrajit Lahiri, Santa Clara, CA (US);
Surinder Bedi, Fremont, CA (US);
Pyongwon Yim, Sunnyvale, CA (US);
Satish Sundar, Milpitas, CA (US);
Vinay Shah, San Francisco, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Douglas Kitajima, San Jose, CA (US);
Venkatesh Babu, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Indrajit Lahiri, Santa Clara, CA (US);
Surinder Bedi, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.