The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Aug. 25, 2008
Vijay Sakhare, Bangalore, IN;
Sekar Krishnasamy, Karnataka, IN;
Mordechai Leska, Rishon Le-Zion, IL;
Donald Foldenauer, San Jose, CA (US);
Rinat Shimshi, San Jose, CA (US);
Marvin L. Freeman, Round Rock, TX (US);
Jeffery Hudgens, San Francisco, CA (US);
Satish Sundar, Karnataka, IN;
Vijay Sakhare, Bangalore, IN;
Sekar Krishnasamy, Karnataka, IN;
Mordechai Leska, Rishon Le-Zion, IL;
Donald Foldenauer, San Jose, CA (US);
Rinat Shimshi, San Jose, CA (US);
Marvin L. Freeman, Round Rock, TX (US);
Jeffery Hudgens, San Francisco, CA (US);
Satish Sundar, Karnataka, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.