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For the Inventor, By the Inventor

Seongnam, South Korea

Sang Ki Nam

This inventor holds 18 USPTO granted patents and 17 published patent applications, primarily in Semiconductor Manufacturing. Top assignees: Samsung Electronics Co., Ltd., Samsung Electronics Ltd., Sungkyunkwan University. Active years: 2019-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Sang Ki Nam. Retrieved from https://idiyas.com/inventor/sang-ki-nam-5ghw4eil

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 18 

% Patents Active = 100.0

Average Co-Inventor Count = 6.2

ph-index = 2

Forward Citations = 16(Granted Patents)


Company Filing History:

goldMedal15 out of 132,108 
 
Samsung Electronics Co., Ltd.
 patents
silverMedal3 out of 6,542 
 
Samsung Electronics Ltd.
 patents
bronzeMedal1 out of 1,366 
 
Sungkyunkwan University
 patents
where one patent can have more than one assignee

Years Active: 2019-2026

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Areas of Expertise:
Plasma Processing
Substrate Treatment
Cleaning Solutions
Semiconductor Device
Plasma Etching
Plasma Generator
Spectroscopic Analysis
RF Sensing
Electron Beam Generator
Hollow Cathode
Cleaning Liquid Processing
Integrated Circuit
18 patents (USPTO):Explore Patents
1. 12719029 - Substrate processing apparatus (2026-08-25),
2. 12695068 - Focus ring and substrate processing apparatus including the same (2026-07-28),
3. 12677614 - Plasma edge ring, plasma etching apparatus including the same, and plasma etching method using the same (2026-07-07),
4. 12638605 - Plasma light detection system including a scintillating window (2026-05-26),
5. 12494352 - Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same (2025-12-09),
6. 12272535 - Spectroscopic analysis method, method for fabricating semiconductor device using the same, and substrate process system using the same (2025-04-08),
7. 12261021 - Apparatus and method for treating substrate (2025-03-25),
8. 11798788 - Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode (2023-10-24),
9. 11664242 - Cleaning solution production systems and methods, and plasma reaction tanks (2023-05-30),
10. 11545372 - Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device (2023-01-03),
11. 11538697 - Substrate processing apparatus (2022-12-27),
12. 11107705 - Cleaning solution production systems and methods, and plasma reaction tanks (2021-08-31),
13. 10950414 - Plasma processing apparatus and method of manufacturing semiconductor device using the same (2021-03-16),
14. 10901007 - RF sensing apparatus of plasma processing chamber and plasma processing chamber including same (2021-01-26),
15. 10795262 - Method of manufacturing integrated circuit device (2020-10-06),

Title: The Innovations of Sang Ki Nam

Introduction

Sang Ki Nam is a prominent inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His work focuses on improving the accuracy and efficiency of spectroscopic analysis methods and substrate treatment processes.

Latest Patents

Among his latest patents are a spectroscopic analysis method, a method for fabricating semiconductor devices, and a substrate process system. The spectroscopic analysis method enhances accuracy by receiving plasma light emitted from plasma to generate an emission spectrum. It detects multiple peak wavelengths from this spectrum and generates correlation factor time series for plasma analysis. Additionally, his substrate treatment apparatus includes a chamber with electrodes and a pulse signal generator, designed to improve the treatment of substrates using a pulsed non-sinusoidal waveform.

Career Highlights

Sang Ki Nam has worked with notable companies such as Samsung Electronics and Sungkyunkwan University. His experience in these organizations has allowed him to develop innovative solutions that address complex challenges in semiconductor fabrication and analysis.

Collaborations

Some of his notable coworkers include Beom Jin Yoo and Sunggil Kang, who have collaborated with him on various projects.

Conclusion

Sang Ki Nam's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a leading inventor. His innovative methods continue to influence advancements in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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