The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Jan. 29, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Young Do Kim, Hwaseong-si, KR;
Sung Yong Lim, Seoul, KR;
Chan Soo Kang, Hwaseong-si, KR;
Do Hoon Kwon, Suwon-si, KR;
Min Ju Kim, Seoul, KR;
Sang Ki Nam, Seongnam-si, KR;
Jung Mo Yang, Pyeongtaek-si, KR;
Jong Hun Pi, Gyeongsangbuk-do, KR;
Kyu Hee Han, Seongnam-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.