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For the Inventor, By the Inventor

Hwaseong, South Korea

Kyu Hee Han

This inventor holds 10 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2018-2023.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kyu Hee Han. Retrieved from https://idiyas.com/inventor/kyu-hee-han-ci6ka472

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 10

% Patents Active = 100.0

Average Co-Inventor Count = 7.1

ph-index = 2

Forward Citations = 13(Granted Patents)


Location History:

  • Hwaseong-si, KR (2018 - 2020)
  • Seongnam-si, KR (2021 - 2023)

Company Filing History:

goldMedal10 out of 132,108 
 
Samsung Electronics Co., Ltd.
 patents

Years Active: 2018-2023

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10 patents (USPTO):Explore Patents
1. 11664242 - Cleaning solution production systems and methods, and plasma reaction tanks (2023-05-30),
2. 11545372 - Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device (2023-01-03),
3. 11107705 - Cleaning solution production systems and methods, and plasma reaction tanks (2021-08-31),
4. 10901007 - RF sensing apparatus of plasma processing chamber and plasma processing chamber including same (2021-01-26),
5. 10832948 - Semiconductor device and method for fabricating the same (2020-11-10),
6. 10825766 - Semiconductor device with multi-layered wiring and method for fabricating the same (2020-11-03),
7. 10804145 - Methods of fabricating semiconductor devices (2020-10-13),
8. 10658231 - Semiconductor device with air gap between wires and method for fabricating the same (2020-05-19),
9. 10304734 - Semiconductor devices and methods of manufacturing the same (2019-05-28),
10. 10062609 - Semiconductor devices and methods of manufacturing the same (2018-08-28),

Title: Kyu Hee Han: Innovator in Semiconductor Cleaning Solutions

Introduction

Kyu Hee Han is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor cleaning technologies. With a total of 10 patents to his name, Han is recognized for his innovative approaches to enhancing cleaning processes in semiconductor manufacturing.

Latest Patents

Among his latest patents are advanced systems and methods for producing cleaning solutions. One notable invention is a cleaning solution production system designed specifically for cleaning semiconductor substrates. This system features a pressure tank and a plasma reaction tank that generates radical species in a decompressed liquid. The generated cleaning solution is then stored in a tank and supplied to the semiconductor substrate through a nozzle. Another significant patent involves a plasma generator and a cleaning liquid processing apparatus that includes a bubble formation section, a plasma generator, and a mixing section. This apparatus is designed to dissolve radicals into a mixed liquid, which is then discharged to clean wafers effectively.

Career Highlights

Kyu Hee Han is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative cleaning technologies. His work has been instrumental in improving the efficiency and effectiveness of semiconductor cleaning processes. His inventions have the potential to significantly impact the semiconductor industry by enhancing the quality of semiconductor devices.

Collaborations

Han has collaborated with notable colleagues, including Jong Min Baek and Woo Kyung You. Their combined expertise has contributed to the advancement of cleaning technologies in the semiconductor field.

Conclusion

Kyu Hee Han is a leading inventor whose work in semiconductor cleaning solutions has garnered attention and respect in the industry. His innovative patents and contributions continue to shape the future of semiconductor manufacturing.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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