The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Jul. 26, 2018
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Woo Kyung You, Incheon, KR;
Jong Min Baek, Seoul, KR;
Sang Shin Jang, Gwangyang-si, KR;
Byung Hee Kim, Seoul, KR;
Vietha Nguyen, Yongin-si, KR;
Nae In Lee, Seoul, KR;
Woo Jin Lee, Gyeongi-do, KR;
Eun Ji Jung, Hwaseong-si, KR;
Kyu Hee Han, Hwaseong-si, KR;
Abstract
A semiconductor device includes a first insulating interlayer on a substrate, metal lines in the first insulating interlayer, a first air gap between the metal lines in a first region of the substrate and a second air gap between the first insulating interlayer and at least one of the metal lines in a second region of the substrate, a liner layer covering top surfaces and side walls of the metal lines and a top surface and a side wall of the first insulating interlayer, adjacent to the first and second air gaps, and a second insulating interlayer on the liner layer and contacting the liner layer.