The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Nov. 06, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sang Ki Nam, Seongnam-si, KR;

Sunggil Kang, Hwaseong-si, KR;

Sungyong Lim, Seoul, KR;

Beomjin Yoo, Hwaseong-si, KR;

Akira Koshiishi, Hwaseong-si, KR;

Vasily Pashkovskiy, Suwon-si, KR;

Kwangyoub Heo, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01J 37/32 (2006.01); H01J 1/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32596 (2013.01); H01J 1/025 (2013.01); H01J 37/32009 (2013.01); H01J 37/32899 (2013.01);
Abstract

A hollow cathode includes an insulation plate having cathode holes. Bottom electrodes are below the insulation plate. The bottom electrodes define first holes having a width greater than a width of the cathode holes. Top electrodes are at an opposite side of the insulation plate from the bottom electrodes. The top electrodes define second holes aligned with the first holes along a direction orthogonal to the upper surface of the insulation plate.


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