Company Filing History:
Years Active: 2019-2023
Title: Innovator Spotlight: Kwangyoub Heo
Introduction
Kwangyoub Heo is a notable inventor based in Yongin-si, South Korea, recognized for his contributions to the field of semiconductor manufacturing. With a total of four patents to his name, Heo has been a driving force behind innovative technologies that enhance semiconductor device production.
Latest Patents
Kwangyoub Heo's latest patents include a groundbreaking hollow cathode design, which features an apparatus specifically for manufacturing semiconductor devices. This innovation incorporates an insulation plate equipped with cathode holes, beneath which bottom electrodes are situated. These electrodes define first holes that exceed the width of the cathode holes. Additionally, the top electrodes are positioned on the opposite side of the insulation plate from the bottom electrodes, defining second holes aligned with the first holes, orthogonal to the insulation plate's upper surface. Another significant patent involves a plasma processing apparatus and method for semiconductor manufacturing. This apparatus includes a chamber containing an electrostatic chuck for substrate loading and a plasma electrode generating an upper plasma. The hollow cathode sits between these components, generating a lower plasma beneath the upper one, featuring cathode holes that are smaller than the plasma sheath thickness of the upper plasma.
Career Highlights
Kwangyoub Heo’s career is marked by his tenure at Samsung Electronics Co., Ltd., a leading global company in technology and semiconductor production. His role as an inventor has allowed him to develop state-of-the-art technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Kwangyoub Heo has worked alongside esteemed colleagues such as Sunggil Kang and Sang Ki Nam. These collaborations have facilitated the exchange of innovative ideas and led to significant advancements in their projects and patents.
Conclusion
Kwangyoub Heo's inventive spirit and dedication to semiconductor technology have positioned him as a key player in the industry. His contributions through his latest patents continue to influence the manufacturing of semiconductor devices, showcasing the importance of innovation within this essential sector. As he progresses in his career, Heo will undoubtedly remain a pivotal figure in shaping the future of semiconductor technology.