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Hikari, Japan

Saburo Kanai

USPTO Granted Patents = 29

Average Co-Inventor Count = 5.6

ph-index = 14

Forward Citations = 510(Granted Patents)


Company Filing History:

goldMedal29 out of 42,485 
 
Hitachi, Ltd.
 patents

Years Active: 1990-2009

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29 patents (USPTO):Explore Patents
1. 7565879 - Plasma processing apparatus (2009-07-28),
2. 7208422 - Plasma processing method (2007-04-24),
3. 6846363 - Plasma processing apparatus and method (2005-01-25),
4. 6833051 - Plasma processing apparatus and method (2004-12-21),
5. 6815365 - Plasma etching apparatus and plasma etching method (2004-11-09),
6. 6583979 - Electrostatically attracting electrode and a method of manufacture thereof (2003-06-24),
7. 6549393 - Semiconductor wafer processing apparatus and method (2003-04-15),
8. 6499424 - Plasma processing apparatus and method (2002-12-31),
9. 6482747 - Plasma treatment method and plasma treatment apparatus (2002-11-19),
10. 6481370 - Plasma processsing apparatus (2002-11-19),
11. 6373681 - Electrostatic chuck, and method of and apparatus for processing sample using the chuck (2002-04-16),
12. 6370007 - Electrostatic chuck (2002-04-09),
13. 6245202 - Plasma treatment device (2001-06-12),
14. 6243251 - Electrostatic chuck, and method of and apparatus for processing sample using the chuck (2001-06-05),
15. 6235146 - Vacuum treatment system and its stage (2001-05-22),

As an AI assistant specialized in innovations, inventions, inventors, patent attorneys, assignees, and patents, I will provide the requested article about inventor Saburo Kanai. Let's start with the structure you provided:

Title: The Legacy of Saburo Kanai: Pioneering Innovations in Plasma Processing Technologies

Introduction:

In the realm of technological advancements, inventors like Saburo Kanai play a crucial role in shaping the future. Hailing from Hikari, Japan, Saburo Kanai's relentless pursuit of innovation and unwavering commitment to excellence continue to inspire generations of inventors worldwide. With a string of 29 patents to his name, Kanai's contributions to the field of plasma processing are unparalleled.

Latest Patents:

Among his latest patents is a cutting-edge Plasma Processing Apparatus. This apparatus includes a plasma generating unit, a process chamber with specially designed cylinders, a gas supply unit, a specimen table, and a vacuum pumping unit. The innovative temperature monitoring and control systems enhance the efficiency and precision of the plasma processing method, setting new standards in the industry.

Career Highlights:

Saburo Kanai's career is intertwined with the renowned company Hitachi, Ltd., a leading force in technological innovation. His tenure at Hitachi has been marked by groundbreaking research and development in the field of plasma processing, earning him a reputation as a visionary inventor with a keen eye for detail and functionality.

Collaborations:

Throughout his career, Saburo Kanai has collaborated closely with esteemed coworkers such as Ken Yoshioka and Kazue Takahashi. Together, they have synergized their expertise to push the boundaries of plasma processing technologies and bring new possibilities to the forefront of the industry.

Conclusion:

In conclusion, Saburo Kanai's remarkable journey as an inventor exemplifies the power of innovation and dedication in driving technological progress. His pioneering work in plasma processing continues to leave an indelible mark on the landscape of modern technology, inspiring future generations to strive for excellence and push the boundaries of what is possible.

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