The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Mar. 01, 2001
Kazue Takahasi, Kudamatsu, JP;
Youichi Itou, Kudamatsu, JP;
Saburo Kanai, Hikari, JP;
Seiichiro Kanno, Inayoshi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An electrostatic chuck for holding a substrate, including an electrode block which serves as an electrode for electrostatic attraction and a plurality of electrostatic attraction arranged on a surface of the electrode block. The electrostatic attraction members are disposed so as to attract the substrate electrostatically and to come in contact with the substrate. An insulating material covers the surface of the electrode block other than attraction surfaces of the electrostatic attraction members. Grooves made by the insulating material are provided between the individual electrostatic attraction members.