The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
May. 07, 2002
Hideyuki Kazumi, Hitachi, JP;
Tsutomu Tetsuka, Ibaraki-ken, JP;
Ryoji Nishio, Mito, JP;
Masatsugu Arai, Kudamatsu, JP;
Ken Yoshioka, Hikari, JP;
Tsunehiko Tsubone, Hikari, JP;
Akira Doi, Ibaraki-ken, JP;
Manabu Edamura, Ibaraki-ken, JP;
Kenji Maeda, Matsudo, JP;
Saburo Kanai, Hikari, JP;
Hideyuki Kazumi, Hitachi, JP;
Tsutomu Tetsuka, Ibaraki-ken, JP;
Ryoji Nishio, Mito, JP;
Masatsugu Arai, Kudamatsu, JP;
Ken Yoshioka, Hikari, JP;
Tsunehiko Tsubone, Hikari, JP;
Akira Doi, Ibaraki-ken, JP;
Manabu Edamura, Ibaraki-ken, JP;
Kenji Maeda, Matsudo, JP;
Saburo Kanai, Hikari, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A plasma is generated by feeding an antenna with radio-frequency electric power generated by a radio-frequency power source, and one end of the antenna is grounded to the earth through a capacitor of variable capacitance. A Faraday shield is electrically isolated from the earth, and the capacitance of the variable capacitor is determined to be such a value that the voltage at the two ends of the antenna may be equal in absolute values and inverted to reduce the partial removal of the wall after the plasma ignition. At the time of igniting the plasma, the capacitance of the capacitor is adjusted to a larger or smaller value than that minimizing the damage of the wall.