Company Filing History:
Years Active: 2018-2025
Title: Ryota Sakane: Innovator in Plasma Processing Technology
Introduction
Ryota Sakane is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 7 patents. His innovative designs and solutions have advanced the capabilities of various industrial applications.
Latest Patents
One of Sakane's latest patents is a stage and plasma processing apparatus. This apparatus features a stage for mounting a substrate, which includes an electrostatic chuck designed to attract the substrate. The base of the apparatus has a first region supporting the electrostatic chuck and a second region for an edge ring surrounding the substrate. These regions are separated by a groove that extends in an annular shape, with a shield provided in the groove to thermally isolate the two regions.
Another notable patent is a seal structure and seal method. This invention includes an elastic body and a cap positioned at the boundary between two components that seal and define a gas flow path. The flow path is established by a first through hole in the first component and a second through hole in the second component. The elastic body features a loop-shaped second opening that overlaps with the first opening of the first through hole, while the cap covers the elastic body, ensuring that the openings align properly. The cap is designed to fit into a groove on the first surface and maintain close contact with the second surface, allowing for smooth operation.
Career Highlights
Ryota Sakane is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to focus on developing cutting-edge technologies that enhance production efficiency and product quality.
Collaborations
Sakane has collaborated with notable colleagues, including Hideyuki Kobayashi and Hiroshi Nagahata. Their combined expertise has contributed to the successful development of innovative technologies in their field.
Conclusion
Ryota Sakane's contributions to plasma processing technology and his impressive portfolio of patents highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes and equipment design.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.