The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Mar. 14, 2019
Tokyo Electron Limited, Tokyo, JP;
Ryota Sakane, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A seal structure includes an elastic body and a cap which are located in a boundary between a first component and a second component that seal and define a gas flow path. The flow path is defined by a first through hole in the first component and a second through hole in the second component, the elastic body has a loop-shaped second opening which overlaps with a first opening of the first through hole, and the cap covers the elastic body such that the first opening, the second opening, and a third opening of the cap overlap with each other. The cap is fitted into a groove in the first surface and is in close contact with the second surface. The cap and second component are in close contact with each other to have slidability.