The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Jan. 15, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Ryota Sakane, Miyagi, JP;
Dai Kitagawa, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01R 13/53 (2006.01); H01R 13/631 (2006.01); C23C 16/458 (2006.01); C23C 16/509 (2006.01); H01R 103/00 (2006.01);
U.S. Cl.
CPC ...
H01R 13/631 (2013.01); C23C 16/4586 (2013.01); C23C 16/5096 (2013.01); H01J 37/32577 (2013.01); H01R 13/53 (2013.01); C23C 16/509 (2013.01); H01R 2103/00 (2013.01);
Abstract
A feeder-cover structure includes a power feeder including a socket and a plug fitted together, a cover structure that covers and seals the power feeder, and a supply mechanism that supplies dry air or an inert gas into the cover structure. A gap is formed between the power feeder and the cover structure such that the dry air or the inert gas is supplied through the gap into the cover structure.