Miyagi, Japan

Dai Kitagawa

USPTO Granted Patents = 12 

Average Co-Inventor Count = 1.6

ph-index = 2

Forward Citations = 45(Granted Patents)


Company Filing History:


Years Active: 2019-2025

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12 patents (USPTO):

Title: Dai Kitagawa: Innovator in Substrate Processing Technology

Introduction

Dai Kitagawa is a prominent inventor based in Miyagi, Japan, known for his significant contributions to substrate processing technology. With a total of 12 patents to his name, Kitagawa has made remarkable advancements in the field, particularly in the design and functionality of substrate processing apparatuses.

Latest Patents

Among his latest patents is a substrate processing apparatus that features a chamber with a sidewall and an opening. This apparatus includes a substrate support, a support member, and an inner wall member designed to enhance the processing of substrates. Another notable patent is a power feeding mechanism that controls the temperature of a stage divided into zones using multiple heaters. This innovative mechanism allows for precise temperature control, improving the efficiency of substrate processing.

Career Highlights

Dai Kitagawa has built a successful career at Tokyo Electron Limited, where he has played a crucial role in developing cutting-edge technologies. His work has not only advanced the capabilities of substrate processing but has also contributed to the overall growth of the semiconductor industry.

Collaborations

Throughout his career, Kitagawa has collaborated with talented individuals such as Katsuyuki Koizumi and Tomoyuki Takahashi. These collaborations have fostered innovation and have led to the successful development of various technologies in the field.

Conclusion

Dai Kitagawa's contributions to substrate processing technology exemplify his dedication to innovation and excellence. His patents and collaborative efforts continue to influence the industry, making him a key figure in the advancement of semiconductor technologies.

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