Robert A Ditizio

Title: The Innovative Contributions of Robert A. Ditizio

Introduction

Robert A. Ditizio is a notable inventor based in Petaluma, California, with a remarkable portfolio of 11 patents. His work primarily focuses on advancements in semiconductor technology, showcasing his expertise and innovative spirit in the field.

Latest Patents

Among his latest patents, one significant invention is the "Formation of a layer on a semiconductor substrate." This patent describes techniques for forming an epitaxial III-V layer on a substrate. In this process, a native oxygen layer is replaced with a passivation layer by treating the substrate with hydrogen plasma. The substrate temperature is elevated to less than 700°C while a group V precursor is flowed into the deposition chamber, transforming the hydrogen-terminated surface into an arsenic-terminated surface. Following this, a nucleation layer is formed by introducing both group III and group V precursors. Finally, a bulk III-V layer is created at an elevated temperature using these precursors.

Another notable patent is related to "Nanolayer deposition using bias power treatment." This invention presents a hybrid deposition process of Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD), known as NanoLayer Deposition (NLD). The NLD process involves a cyclic sequential deposition method, where a first plurality of precursors is introduced to deposit a thin layer, followed by a second plurality of precursors for plasma treatment of the deposited layer. The plasma treatment can be isotropic, anisotropic, or a combination of both, optimizing the effectiveness of the treatment.

Career Highlights

Robert has worked with several prominent companies throughout his career, including Tegal Corporation and ASM International N.V. His contributions to these organizations have significantly advanced the field of semiconductor technology.

Collaborations

Robert has collaborated with notable colleagues such as Stephen P. DeOrnellas and Tue H. Nguyen, further enhancing his innovative endeavors.

Conclusion

Robert A. Ditizio's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative techniques continue to influence advancements in technology and materials science.