The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Aug. 24, 1999
Applicant:
Inventors:
Stephen P. DeOrnellas, Petaluma, CA (US);
Robert A. Ditizio, Petaluma, CA (US);
Assignee:
Tegal Corporation, Petaluma, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract
A reactor includes a shield which prevents the deposition of materials along a line-of-sight path from a wafer toward and onto an electrode , or a window which couples an electrode to a reaction chamber of the reactor . The shield can be comprised of a conductor and/or an insulator. The shield can affect the character of a plasma generated in the reactor.