Ritsuo Fukaya

This inventor holds 18 USPTO granted patents and 1 published patent application, primarily in Scanning Electron Microscopy. Top assignees: Hitachi, Ltd., Hitachi-High-Technologies Corporation. Active years: 1999-2015.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Ritsuo Fukaya. Retrieved from https://idiyas.com/inventor/ritsuo-fukaya

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 18 (Patent Applications = 1)

% Patents Active = 77.8

Average Co-Inventor Count = 4.0

ph-index = 7

Forward Citations = 142(Granted Patents)

Location History:

Hitachinaka, JP (1999 - 2014)
Tokyo, JP (2014 - 2015)

Company Filing History:

Hitachi-High-Technologies Corporation

patents

Years Active: 1999-2015

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Areas of Expertise:

Scanning Electron Microscope

Charged Particle Beam

Electrostatic Charge Measurement

Sample Measurement

Focus Adjustment

Dimension Measurement

Liquid Crystal Display

In-Plane Switching

Irradiation System

Optical Condition Setting

Sample Electrification

18 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8969801 - Scanning electron microscope (2015-03-03),

2. 8907267 - Charged particle beam device (2014-12-09),

3. 8835844 - Sample electrification measurement method and charged particle beam apparatus (2014-09-16),

4. 8692197 - Scanning electron microscope optical condition setting method and scanning electron microscope (2014-04-08),

5. 8487251 - Method for controlling charging of sample and scanning electron microscope (2013-07-16),

6. 8178836 - Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope (2012-05-15),

7. 8080789 - Sample dimension measuring method and scanning electron microscope (2011-12-20),

8. 7851756 - Charged particle beam irradiation system (2010-12-14),

9. 7745782 - Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope (2010-06-29),

10. 7700918 - Sample electrification measurement method and charged particle beam apparatus (2010-04-20),

11. 7659508 - Method for measuring dimensions of sample and scanning electron microscope (2010-02-09),

12. 7566872 - Scanning electron microscope (2009-07-28),

13. 7372028 - Sample electrification measurement method and charged particle beam apparatus (2008-05-13),

14. 7087899 - Sample electrification measurement method and charged particle beam apparatus (2006-08-08),

15. 6946656 - Sample electrification measurement method and charged particle beam apparatus (2005-09-20),

Title: Ritsuo Fukaya: Innovator in Electron Microscopy and Charged Particle Beam Technology

Introduction

Ritsuo Fukaya is a prominent inventor based in Hitachinaka, Japan, known for his significant contributions to the fields of electron microscopy and charged particle beam technology. With a total of 18 patents to his name, Fukaya has made remarkable advancements that enhance the capabilities of scientific instruments.

Latest Patents

Fukaya's latest patents include a groundbreaking scanning electron microscope designed to detect reflected electrons at any emission angle. This innovative microscope features a control electrode that differentiates between secondary electrons and reflected electrons, a secondary electron conversion electrode that generates secondary electrons, and an energy filter that discriminates between the two types of electrons. Additionally, he has developed a charged particle beam device that corrects scanning deflection amounts, allowing for accurate imaging and measurement of low-step or charged samples. This device addresses length measurement errors and scaling fluctuations, ensuring precise results.

Career Highlights

Throughout his career, Ritsuo Fukaya has worked with notable companies such as Hitachi, Ltd. and Hitachi High-Technologies Corporation. His work has significantly impacted the development of advanced imaging technologies, making him a key figure in the industry.

Collaborations

Fukaya has collaborated with esteemed colleagues, including Makoto Ezumi and Tatsuaki Ishijima, contributing to the advancement of technology in his field.

Conclusion

Ritsuo Fukaya's innovative work in electron microscopy and charged particle beam technology has established him as a leading inventor in Japan. His contributions continue to influence the scientific community and enhance the capabilities of modern imaging techniques.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

1 patent pending: