The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Sep. 27, 2012
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Nobuhiro Okai, Tokyo, JP;
Yasunari Sohda, Tokyo, JP;
Ritsuo Fukaya, Tokyo, JP;
Zhigang Wang, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample () has: a control electrode () that discriminates between secondary electrons from the sample () and reflected electrons; a secondary electron conversion electrode () that generates secondary electrons by the impact of reflected electrons; a withdrawing electrode () that withdraws those secondary electrons; an energy filter () that discriminates between the secondary electrons withdrawn and electrons reflected from the sample (); and a control calculation means () that selects a combination of voltages applied to the secondary electron conversion electrode (), the withdrawing electrode (), and energy filter ().