Yasunari Sohda

This inventor holds 76 USPTO granted patents and 1 published patent application and 2 EPO patents, primarily in Electron Beam Technology (CPC class H01J). Top assignees: Hitachi-High-Technologies Corporation, Hitachi, Ltd., Canon Kabushiki Kaisha. Active years: 1994-2022.

USPTO Granted Patents = 76 (Patent Applications = 1)

% Patents Active = 72.4

EPO Patents = 2 (Patent Applications = 2)

Average Co-Inventor Count = 4.3

ph-index = 9

Forward Citations = 269(Granted Patents)

Forward Citations (Not Self Cited) = 255(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Hachiouji, JP (1995)
Hachioji, JP (1994 - 2003)
Kawasaki, JP (2003 - 2016)
Tokyo, JP (2005 - 2022)

Company Filing History:

44 out of 2,874

Hitachi-High-Technologies Corporation

Canon Kabushiki Kaisha

patents

4. 4 out of 1,372

Hitachi High-Tech Corporation

patents

5. 3 out of 2,280

Adv Antest Corporation

patents

6. 3 out of 834,411

Other

patents

where one patent can have more than one assignee

Years Active: 1994-2022

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Areas of Expertise:

Electron Beam Device

Scanning Electron Microscope

Charged Particle Beam

Calibration Sample

Defect Inspection

Pattern Measurement

Aberration Correction

Electron Gun

Focus Adjustment

Pattern Evaluation

Displacement Measurement

Pattern Forming

76 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11435178 - Calibration sample, electron beam adjustment method and electron beam apparatus using same (2022-09-06),

2. 11276551 - Inspection device (2022-03-15),

3. 11251018 - Scanning electron microscope (2022-02-15),

4. 11227740 - Electron gun and electron beam application device (2022-01-18),

5. 10825649 - Electron beam device (2020-11-03),

6. 10692693 - System and method for measuring patterns (2020-06-23),

7. 10636618 - Charged particle beam apparatus (2020-04-28),

8. 10629405 - Electron beam device and sample inspection method (2020-04-21),

9. 10559450 - Scanning electron microscope (2020-02-11),

10. 10446361 - Aberration correction method, aberration correction system, and charged particle beam apparatus (2019-10-15),

11. 10134558 - Scanning electron microscope (2018-11-20),

12. 10014160 - Scanning electron microscope and method for controlling same (2018-07-03),

13. 9960006 - Charged-particle-beam device (2018-05-01),

14. 9799483 - Charged particle beam device and detection method using said device (2017-10-24),

15. 9644955 - Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same (2017-05-09),

Certainly! Here is the article about inventor Yasunari Sohda:

Title: Yasunari Sohda: A Trailblazer in Innovation

Introduction:

Yasunari Sohda, a distinguished inventor hailing from Kawasaki, Japan, is a prominent figure in the realm of innovation. With an impressive portfolio of 76 patents, his relentless pursuit of groundbreaking technological advancement has positioned him as a standout figure inspiring future generations to push the boundaries of invention.

Latest Patents:

Sohda's latest patents include a Calibration sample and an electron beam adjustment method and apparatus. These inventions focus on implementing a calibration sample that allows for precise measurement of incident angles, enhancing electron beam adjustment processes with unparalleled accuracy.

Career Highlights:

Having contributed significantly to the technological landscape, Sohda has made pivotal contributions during his tenure at Hitachi High-Technologies Corporation and Hitachi Co., Ltd. His innovative spirit and dedication to excellence have shaped his career, leading to the development of cutting-edge solutions in the field of electron beam technology.

Collaborations:

Throughout his career, Sohda has collaborated with esteemed colleagues such as Yoshinori Nakayama and Yasuhiro Someda. Together, they have worked on various projects, driving innovation and fostering a collaborative environment that nurtures creativity and ingenuity.

Conclusion:

In conclusion, Yasunari Sohda's remarkable journey as an inventor epitomizes the essence of ingenuity and perseverance. His exceptional contributions to electron beam technology and precision measurement techniques have left an indelible mark on the industry, inspiring aspiring inventors to dare to dream and redefine the boundaries of innovation.